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It is a multi zone slidable PE-CVD tube furnace system consists of 500W RF plasma source, with optional tube size and an integrated slidable rail, 4 channel precision mass flow meter with gas mixing tank, and a high quality oil-less vacuum pump. Such a PE-CVD furnace is a new tool to grow nano-wire or graphene with the following benefits:
|
ulti zone PECVD tube furnace |
Model |
TL1200-1200-PECVD-I |
TL1200-1200-PECVD-II |
TL1200-1200-PECVD-III |
TL1200-1200-PECVD-IV |
|
Power |
3KW |
3KW |
4KW |
4KW
|
|
|
Tube size |
Dia 60(OD) X1800mm |
Dia 80(OD) X1800mm |
Dia 100(OD) X1800mm |
Dia120(OD)X1800mm
|
|
|
Dimension |
1800X410X610 |
1800X410X610 |
1800X460X660 |
1800X460X660 |
|
|
Power supply |
220V |
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Phase |
Single phase |
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Heating parts |
Rsistance wire(Kanthal)imported from Sweden |
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Temperature control mode |
PID |
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Broken accidentally protection |
Yes |
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Over-temperature protection |
YES |
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Over current protection |
YES |
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Furnace materials |
Polycrystal alumina fiber(Japan) |
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Control precision |
+/- 1 ℃ |
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Trigger |
Phase-shifted trigger |
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Elctric parts |
CHINT |
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CE |
|
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RF Generator
|
Output power |
0-500W |
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Max reflection power |
10W |
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RF frequency |
13.56MHZ±0.005% |
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Noise |
<30 dB. |
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Cooling |
Air cooling |
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Power |
208-240V 50/60HZ |
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|
Gax mixing station
|
Standard range |
Adopts proton flow controller 5,10,20,30,50,100,200,300,500SCCM,1,2,3,5,10SLM (Optional) |
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|
Accuracy |
±1.5% |
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|
Air pressure drop |
<0.01MPa |
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Duplicate accuracy |
±0.2% F.S |
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|
MAX pressure |
3MP |
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|
Vacuum pump
|
Power |
220V/ 380V 380W |
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|
Speed |
2L/S |
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|
Resistance vacuum meter |
ZDR-I |
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|
Vacuum degree measuring range |
0.1-10 5 Pa |
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|
Vacuum pump |
VRD-8(Can be changed) |
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|
Corrugated pipe |
KF25X1000mm |
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|
System vacuum degree |
10 -1Pa |
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