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Slidable Multi Zone PECVD Tube Furnace (Optional Tube Size) with 4 Channel Gas D

PE-CVD tube furnace system consists of 500W RF plasma source,with optional tube size and an integrated slidable rail, 4 channel precision mass flow meter with gas mixing tank, and a high quality oil-less vacuum pump
Product Details

It is a multi zone slidable PE-CVD tube furnace system consists of 500W RF plasma source, with optional tube size and an integrated slidable rail, 4 channel precision mass flow meter with gas mixing tank, and a high quality oil-less vacuum pump. Such a PE-CVD furnace is a new tool to grow nano-wire or graphene with the following benefits:

  • Lower temperature processing compared to conventional CVD
  • High heating & cooling rate using sliding furnace
  • Each heating zone to create thermal gradient up to 200ºC
  • 1100ºC Max. working temperature
  • Offers a wide range of material deposition, such as Carbon & ZnO nanowire (or tube) and single layer graphene

ulti zone PECVD tube furnace

Model

TL1200-1200-PECVD-I

TL1200-1200-PECVD-II

TL1200-1200-PECVD-III

TL1200-1200-PECVD-IV

Power

3KW

3KW

4KW

4KW

Tube size

Dia 60(OD) X1800mm

Dia 80(OD) X1800mm

Dia 100(OD) X1800mm

Dia120(OD)X1800mm

Dimension

1800X410X610

1800X410X610

1800X460X660

1800X460X660

Power supply

220V

Phase

Single phase

Heating parts

Rsistance wire(Kanthal)imported from Sweden

Temperature control mode

PID

Broken accidentally protection

Yes

Over-temperature protection

YES

Over current protection

YES

Furnace materials

Polycrystal alumina fiber(Japan)

Control precision

+/- 1

Trigger

Phase-shifted trigger

Elctric parts

CHINT

CE


RF Generator

Output power

0-500W

Max reflection power

10W

RF frequency

13.56MHZ±0.005%

Noise

<30 dB.

Cooling

Air cooling

Power

208-240V  50/60HZ

Gax mixing station

Standard range

Adopts proton flow controller 5,10,20,30,50,100,200,300,500SCCM,1,2,3,5,10SLM  (Optional)

Accuracy

±1.5%

Air pressure drop

<0.01MPa

Duplicate accuracy

±0.2% F.S

MAX pressure

3MP

Vacuum pump

Power

220V/ 380V   380W

Speed

2L/S

Resistance vacuum meter

ZDR-I

Vacuum degree measuring range

0.1-10 5 Pa

Vacuum pump

VRD-8(Can be changed)

Corrugated pipe

KF25X1000mm

System vacuum degree

10 -1Pa